Versatile Lubricants That Protect Delicate Electronic Components

In electronics and semiconductor manufacturing, contamination can hinder equipment accuracy, repeatability of operations, and the lifespan of equipment. High-performance lubricants help to reduce contaminants and outgassing when used in vacuum pumps and cleanrooms, where electronics and semiconductors are fabricated. This helps improve yields while extending the operating life of the equipment.

Multipurpose, high-temperature, and anti-corrosion lubricants (greases, oils, and vacuum pump fluids) are also used in a variety of production line components, including:

• Bearings
• Valves
• Seals
• O-rings
• Chains
• Compressors
• Gear boxes
• Mechanical pumps and other components

Krytox™ performance lubricants offer excellent safety and protection for the electronics and semiconductor industries. These long-life oils and greases are used routinely in wet and dry pumps, vacuum systems, cleanrooms, robotics systems, and more. In these applications, Krytox™ performance lubricants are recognized by all major vacuum pump manufacturers and OEM equipment suppliers, meeting or exceeding warranty requirements.

Highly Stable and Safe Lubricants for Cleanrooms

Krytox™ performance lubricants withstand extreme temperatures and pressures that hydrocarbon, silicone, and chlorofluorocarbon greases cannot match, providing a more stable environment for sensitive electronic components.

Because reactive chemicals and materials can also threaten semiconductors and electronics, using a lubricant that is incompatible with these substances may damage components. Krytox™ performance lubricants are chemically and biologically inert, making them compatible with oxygen and nonreactive to virtually all chemicals, plastics, metals, and elastomers.

Beyond delivering stability and safety in harsh conditions, Krytox™ lubricants also have an extended life, so components do not require frequent relubrication.

Additional properties that make Krytox™ performance lubricants well-suited for use in electronics and semiconductor industries include:

• Excellent vapor pressure to withstand high temperatures—from -15 to 300 °C (5 to 572 °F)–as low as 10 to 13 mmHg
• Nonreactive to acidic or caustic cleaners and disinfectants, steam, and moisture, thus preventing damage
• Safe to use—no volatile organic compound (VOC) materials or chlorine
• Minimal environmental footprint—fluids can be regenerated
• Compatible with chemicals commonly used in the industry

Special Krytox™ Lubricants

Krytox™ VPF (Vacuum Pump Fluids)

Krytox™ VPFs are used in applications where conventional vacuum pump oils can cause issues for safety, waste disposal, and maintenance. Krytox™ VPF is highly stable, which limits waste and maintenance issues. It is also nonflammable, reducing the chance of fire in pumps.

Additionally, Krytox™ VPFs do not contain acetal groups, so they are not susceptible to attack by Lewis acids, a critical element in semiconductor production. These lubricants are widely recognized by major vacuum pump manufacturers because of these unique properties.

Krytox™ LVP (Low Vapor Pressure) Grease

Krytox™ LVP grease will not explode, ignite, decompose, react to form gummy or solid deposits, or act as fuel for fires.